Coater&Developer (HHI-06.1) - PR880027 - 3220 -P

Description du marché

1 piece Coater&Developer The acquisition of an automatic resist deposition and development system is required for the flexible, accurate and reproducible process chain for heterogeneous chiplet integration with multi-material capability on material sizes up to 200 mm. chiplet integration with multi-material capability on material sizes up to 200 mm, mainly on LNOI and III/V material. To meet the requirement for a reproducible process, an automated resist deposition and development system is required that can also process 200 mm wafers. This and the acquisition of a DirectWrite laser system closes the gap between manual contact lithography and high-resolution but very slow beam lithography and also opens up the possibility of creating 3D structures. It also opens up the possibility of creating 3D structures in resist, which is currently not possible. Option 1: UV unit Option 2: Warranty extension of 12 months Option 3: Warranty extension of 24 months

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