Glovebox with integrated evaporator deposition tool and integrated dual target sputtering tool with capability of coupling to an Atomic Layer Deposition (ALD) Tool

Description du marché

University College Cork request the supply of an argon recirculating glovebox with integrated deposition tools (Lot 1). The glovebox which will be capable of processing lithium-based battery materials and will integrate materials deposition capability utilizing RF sputtering and evaporation for synthesis and multi-parametric test of liquid, polymer and solid-state systems for energy devices. The equipment will be used for liquid, polymer and all solid-state stacks of energy devices to be fabricated with the interface control giving enhanced energy and power density and device lifetimes. In particular, the RF sputter tool will enable true solid state electrolyte deposition. This integrated research tool will enable analysis of the key role of the interface in the achievement of next generation active materials and electrolyte interactions. The integrated deposition tools will be capable of sequential layer deposition. Compatibility with and ability to process potential future batteries based on more sustainable materials such as sodium and iron will also require such a capability. The deposition suite will also permit advances focussed on integrated magnetic devices including CoFe and CoFeN alloys materials and multilayer films. The integrated system will include ALD processing capability of the Plasma enhanced Atomic Layer Deposition (ALD) Tool (Lot 2) as interface engineering and control are key to the development of the tailored energy materials for electrode and electrolyte enhancement in batteries, supercapacitors and PV devices

Pouvoir adjudicateur