Inline xps/xrf (ipms-cnt03.1) - pr930836-2480-p

Description du marché

1 piece Inline XPS/XRF An ultra-high vacuum x-ray photoelectron spectrometer equipped with a monochromatic x-ray source, sputter and angle-resolved XPS, and charge compensation. This x-ray photoelectron spectrometer will be used to characterize thin films and multilayers by analyzing the composition and stoichiometry on silicon wafers with a diameter of 300- and 200-mm. This x-ray photoelectron spectrometer will be used in-line in the cleanroom. Optional service items: 20.1 Extended warranty Extension of the warranty period for further 12 months. yes / no; Please quote as an option 20.2 Additional x-ray source Monochromated CrKα yes / no; Please quote as an option 20.3 Additional x-ray source Monochromated AgLα yes / no; Please quote as an option 20.4 Additional sputter source Argon cluster ion source with tunable cluster size yes / no; Please quote as an option 20.5 Ultraviolet source He I / He II ultraviolet source to perfrom Ultraviolet Photoelectron Spectroscopy (UPS) analysis. yes / no; Please quote as an option 20.6 Electron microscopy Scanning Auger Micsroscopy (SAM) / Scanning Electron Microscopy (SEM) with a tunable energy range and a resolution < 2 µm. yes / no; Please quote as an option 20.7 Scattering spectroscopy Low energy ion scattering spectroscopy (LEISS) for ultra surface sensitive analysis. yes / no; Please quote as an option

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