LA2974C- UCC- RFT for the Supply, Delivery and Installation of a Wafer Surface Planarisation System

Description du marché

University College Cork request the supply of a Wafer Surface Planarisation System for use with semiconductor materials in wafer format. The required system will be used to level, planarise, the surface of a wafer following processing where complex layers and 3D structures have been built up. The system will be required to reduce surface height variation and surface roughness over a large area, i.e. a full wafer. The system will be required to process as wide a range of materials as possible, particularly metals and polymers, and must be suited for use with wafer sizes of up to 200mm, 8 inches, in diameter.

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