PVT-Reaktor (IISB.WP4.1) - PR1078011-2790-P

Description du marché

1 Piece PVT-Reaktor The high-temperature furnace system will be employed for fabrication of aluminum nitride (AlN) crystals using the physical vapor transport (PVT) method. To ensure a stable, long-time operation at conditions of the AlN growth process, the PVT system should be based on a water-cooled double wall reactor made of quartz glass with an inner diameter of at least 255 mm. An associated induction RF heating system should be designed for the thermal processing of the hot zone made of graphite. It is supposed that the reactor is equipped with a bottom loading system with a loading device, which is capable of accommodating loads of at least 20 kg. A normal operation of the PVT tool for AlN growth occurs at temperatures up to 2500°C, reactor pressure between 1 and 1000 mbar with a constant flow of a high purity nitrogen or nitrogen/argon mixture. It is essential that the PVT system allows continuous operation during last at least 240 hours. The design of the reactor and of the vacuum system should be adapted for highly dusted exhaust gases and allow simple regular cleaning. It is important that the footprint and the height of the installed PVT system are not exceed 1.2 x 2.1 m and 3 m. A height in the transportation position less than 2.1 m is required.

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