Request for market information: Mercury CV prober for semiconductor wafer analysis

Description du marché

The object of the request for information is a Mercury CV prober for semiconductor wafer analysis. The system needs to contain a Mercury CV probe, accessory and safety equipment. Required specifications are described in more detail below. Specifications: Mercury CV prober o Manual wafer loading o Wafer size: 20x20 mm coupons to 300 mm wafers o Mapping of up to 300 mm wafers o C-V and I-V measurements using top and bottom side return contacts o Mercury contact spot size: max 1 mm o DC BIAS: up to +-3kV o AC frequency range: 50 Hz - 1 MHz o Full computer control of measurements, wafer mapping, data analysis and storage. Facility requirements: o Designed for cleanroom use: Will be installed in a ISO4 or ISO6 cleanroom o Cabinet extract with mercury vapor filtering inside the tool cabinet o Mercury vapor concentration measurement inside the tool cabinet o Cleanroom floor space requirement: max 2x2m (excluding service area) Schedule: o The delivery must take place in 2025

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